The maintenance and control of clean room cleanliness, in addition to the investment in hard equipment, also requires good software - management system to match, in order to maintain good cleanliness; clean room operation management, according to the operator, the original Materials, equipment and things used in the clean room are discussed; the clean room system is not only known as the air conditioning system, but also the process equipment is included. This section will give a brief description of the operation and maintenance of the two systems.
First, pollution source control
The maintenance and control of clean room cleanliness, in addition to the investment in hard equipment, also requires a good software-management system to match, in order to maintain good cleanliness. The source of micro-polluting in the clean room, after testing and analysis results, the operator accounted for about 80%.
The pollution source of the clean room can be divided into external pollution and internal pollution sources. External pollution sources mainly include air conditioning air supply, gap infiltration, buildings, overalls, duct materials and general gases such as N2, O2, Air, water supply, solvent, etc.; while internal pollution sources include process equipment, workers, tools, processing processes , compartment materials, work tables, packaging materials, etc.
For the silicon chip, the adhesion of the dust particles will cause deformation or short circuit of the integrated circuit, and the chip will lose its operational function. Therefore, the control of the micro-polluting source has become an important part of the clean room management. Table 1 shows the dust concentration measured by the natural environment, which can be used as a design reference. In micro-polluting control, there are four basic principles:
1. Prevention of external dust intrusion: clean room operation and maintenance management
Appropriate positive pressure maintenance (>0.5mmAq) in the clean room, do not leak the construction work, do the dustproof action such as cleaning and wiping before the personnel equipment and raw materials are moved into the clean room, and properly manage and set the air filter. .
2. Indoor dust prevention: clean room operation and maintenance management
Appropriate selection of clean room materials such as partition boards, floors, dust suppression of process equipment, production automation and non-assembly of personnel, relaxation of movement, management of clean clothes, use of clean room special devices, etc.
3. The indoor dust does not accumulate:
The wall should be smooth and free of dead angles, clean rooms should be regularly maintained and cleaned, and space should be left around the process equipment.
4. Exclusion of dust:
The number of air changes should be sufficient, and the proper space arrangement and the airflow speed of the source of exhaust gas and air conditioning must be appropriate.
The management problems of people and things entering the room, the problems of actual working conditions and engineering management, the problem of indoor air conditioning and cleaning relationship, these issues will be discussed in the next section. Clean room operation and maintenance management
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